Etching Time Effect on Photoluminescence, Porosity, Surface Morphology and Conductivity of Porous Silicon
Loading...
Date
2016
Journal Title
Journal ISSN
Volume Title
Publisher
EDUCATUM Journal of Science, Mathematics and Technology (EJSMT)
Abstract
Recently, porous silicon (PS) gains a lot of research interest with its potential applications in optoelectronics, flat panel
displays technology, and chemical sensor. In this work, PS was chemically etched on p-type silicon (Si) wafer by
hydrofluoric acid (HF) with 40% nitric acid (HNO3) concentration at different etching time. The PS has porosity
dependent on etching time in the range (38-60) % that gives orange-red photoluminescence (PL) between 657 nm to
661 nm. The PL intensity increases and the peak wavelength shows slight blue shift as etching time increases. The
energy gap obtained are higher than pure Si (1.11eV). Meanwhile, the conductivity of the PS decreases as the porosity
and energy gap increase.
Description
Keywords
porous silicon, chemical etching, photoluminescence, energy gap, conductivity
Citation
Vol. 3 No. 1